%0 Journal Article
%T Plasma beam alignment for the large‐area substrates: Equipment and process
%A Yaroshchuk, O. V.
%A Kravchuk, R. M.
%A Dobrovolskyy, A. M.
%A Liu, P. C.
%A Lee, C. D.
%J Journal of the Society for Information Display
%V 13
%N 4
%@ 1071-0922
%D 2005-04-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve