%0 Journal Article
%T Rigorous EUV mask simulator using 2D and 3D waveguide methods
%A Zhu, Zhengrong
%A Lucas, Kevin
%A Strojwas, Andrzej J.
%J Proceedings of SPIE
%V 5037
%N 1
%P 494-503
%@ 0277-786X
%D 2003-06-13
%I SPIE
%~ DeepDyve