%0 Journal Article
%T Ion assisted deposition of SiO 2 film from silicon
%A Pham, Tuan.H. 
%A Dang, Cu. X.
%J Proceedings of SPIE
%V 5963
%N 1
%P 59631U-59631U-4
%@ 0277-786X
%D 2005-09-30
%I SPIE
%~ DeepDyve