%0 Journal Article
%T In-situ ultrahigh vacuum spectroscopic ellipsometry
%A Fukazawa, Tomoyuki
%A Ishihara, Kazuki
%J Proceedings of SPIE
%V 2873
%N 1
%P 180-183
%@ 0277-786X
%D 1996-08-16
%I SPIE
%~ DeepDyve