%0 Journal Article
%T Development of three-dimensional monolithic microwave integrated circuit components
%A Hwu, R. Jennifer
%A Ren, Jishi
%J Proceedings of SPIE
%V 4111
%N 1
%P 192-200
%@ 0277-786X
%D 2000-12-18
%I SPIE
%~ DeepDyve