%0 Journal Article
%T Study of RLS trade-off mitigation utilizing an organotin-containing chemically amplified resist for high sensitivity patterning
%A Enomoto, Satoshi
%A Machida, Kohei
%A Naito, Michiya
%A Kozawa, Takahiro
%J Proceedings of SPIE
%V 12292
%P 122920D-122920D-5
%@ 0277-786X
%D 2022-12-01
%I SPIE
%~ DeepDyve