%0 Journal Article %T Improved Adhesion of Metal Electrode Layer on Si3N4 Substrate through an All-Wet Process %A Kim, Danbi %A Eom, Nu Si A %A Kim, Jiwon %A Lee, Kyu Hyoung %A Park, Sung Heum %A Lee, Ju Ho %A Chao, Yong-Ho %A Lim, Jae-Hong %J ECS Journal of Solid State Science and Technology %V 8 %N 2 %@ 2162-8769 %D 2019-01-01 %~ DeepDyve