%0 Journal Article
%T A New Negative Deep UV Resist Based on an Alternating Copolymer–Onium Salt System. Synthesis and Property of a 1:1 Alternating Copolymer of N-Vinylcarbazole with Ethyl Glycidyl Fumarate
%A Zeng, Weiping
%A Shirota, Yasuhiko
%A Endo, Masataka
%A Tani, Yoshiyuki
%J Chemistry Letters
%V 18
%N 6
%P 1013-1016
%@ 0366-7022
%D 2006-05-08
%I Oxford University Press
%~ DeepDyve