%0 Journal Article
%T Pattern transfer to silicon by microcontact printing and RIE
%A Whidden, Thomas K
%A Ferry, David K
%A Kozicki, Michael N
%A Kim, Enoch
%A Kumar, Amit
%A Wilbur, James
%A Whitesides, George M
%J Nanotechnology
%V 7
%N 4
%P 447-451
%@ 0957-4484
%D 1999-01-01
%~ DeepDyve