%0 Journal Article
%T Nanoindentation of AlGaN Films Formed on SiC/Si Substrates Grown by the Method of Coordinated Substitution of Atoms
%A Grashchenko, A. S.
%A Kukushkin, S. A.
%A Osipov, A. V.
%A Sharofidinov, Sh. Sh.
%J Mechanics of Solids
%V 58
%N 4
%P 1089-1097
%@ 0025-6544
%D 2023-08-01
%I Pleiades Publishing
%~ DeepDyve