%0 Journal Article %T Mobility enhancement in recessed-gate AlGaN/GaN MOS-HFETs using an AlON gate insulator %A Hosoi, Takuji %A Watanabe, Kenta %A Nozaki, Mikito %A Yamada, Takahiro %A Shimura, Takayoshi %A Watanabe, Heiji %J Japanese Journal of Applied Physics %V 58 %N SC %P 6 %@ 0021-4922 %D 2019-05-20 %~ DeepDyve