%0 Journal Article %T Three-dimensional surface profile measurement by using liquid crystal grating with triangular intensity distribution patterns %A Fujita, Hiroo %A Yoshizawa, Toru %J Proceedings of SPIE %V 4902 %N 1 %P 22-29 %@ 0277-786X %D 2002-10-07 %I SPIE %~ DeepDyve