%0 Journal Article
%T Variable Magnification In A 1:1 Projection Lithography System
%A Greed, James J.
%A Markle, David A.
%J Proceedings of SPIE
%V 334
%P 2-9
%@ 0277-786X
%D 1982-09-13
%I SPIE
%~ DeepDyve