%0 Journal Article
%T Application of substructuring method to three-dimensional optical lithography simulation
%A Lee, Seung-Gol
%A Lee, Dong-Hoon
%A Lee, Jong-Ung
%A Cho, MeangHyo S.
%J Proceedings of SPIE
%V 3334
%N 1
%P 795-802
%@ 0277-786X
%D 1998-06-29
%I SPIE
%~ DeepDyve