%0 Journal Article
%T Evaluation of a wafer transportation speed for propulsion nozzle array on air levitation system
%A Moon, In-Ho
%A Hwang,  Young-Kyu
%J Journal of Mechanical Science and Technology
%V 20
%N 9
%P 1492-1501
%@ 1738-494X
%D 2006-09-01
%I Korean Society of Mechanical Engineers
%~ DeepDyve