%0 Journal Article
%T The verification of printability about marginal defects and the detectability at the inspection tool in sub 50nm node
%A Lee, Hyemi
%A kim, changreol
%J Proceedings of SPIE
%V 7028
%N 1
%P 70282V-70282V-8
%@ 0277-786X
%D 2008-05-02
%I SPIE
%~ DeepDyve