%0 Journal Article
%T Photosensitive etch protection coating for silicon wet-etch applications
%A Dalvi-Malhotra, J.
%J Proceedings of SPIE
%V 6884
%N 1
%P 68840J-68840J-8
%@ 0277-786X
%D 2008-02-07
%I SPIE
%~ DeepDyve