%0 Journal Article
%T On the reduction of gas permeation through the glass windows of micromachined vapor cells using Al$_{2}$O$_{3}$ coatings
%A Carlé, Clément
%A Mursa, Andrei
%A Karvinen, Petri
%A Keshavarzi, Shervin
%A Hafiz, Moustafa Abdel
%A Maurice, Vincent
%A Boudot, Rodolphe
%A Passilly, Nicolas
%J Physics
%V 2024
%N 2404
%D 2024-04-10
%~ DeepDyve