%0 Journal Article
%T Spatial modulation of nanopattern dimensions by combining interference lithography and grayscale-patterned secondary exposure
%A Gan, Zhuofei
%A Feng, Hongtao
%A Chen, Liyang
%A Min, Siyi
%A Liang, Chuwei
%A Xu, Menghong
%A Jiang, Zijie
%A Sun, Zhao
%A Sun, Chuying
%A Cui, Dehu
%A Li, Wen-Di
%J Light:Science & Applications
%V 11
%N 1
%D 2022-04-08
%I Nature Publishing Group UK
%~ DeepDyve