%0 Journal Article
%T Patterning of nickel-titanium SMA films with chemical etching by a novel multicomponent etchant
%A Ding, Guifu
%J Proceedings of SPIE
%V 3892
%N 1
%P 340-345
%@ 0277-786X
%D 1999-10-01
%I SPIE
%~ DeepDyve