%0 Journal Article %T Study on phase measurement uncertainty according to the number of phase shifting steps in a multiwavelength interferometer directly using optical comb modes %A Park, J. %A Jang, Y.-S. %A Jin, J. %J Proceedings of SPIE %V 13134 %P 1313406-1313406-6 %@ 0277-786X %D 2024-09-30 %I SPIE %~ DeepDyve