%0 Journal Article
%T Effect of Liner Oxide Densification on Stress-Induced Leakage Current Characteristics in Shallow Trench Isolation Processing
%A Park, Jeong Hwan
%A Shin, Seung-Woo
%A Park, Sang-Wook
%A Kong, Young-Taek
%A Kim, Dong-Jin
%A Suh, Min-Suk
%A Lee, Seung-Cheol
%A Kwak, Noh-Yeal
%A Dong, Cha-Deok
%A Kim, Do-Woo
%A Lee, Geun-Il
%A Kwon, Oh-Jung
%A Yang , Hong-Seon
%J Journal of the Electrochemical Society
%V 150
%N 7
%P G359-G364
%@ 0013-4651
%D 2003-05-12
%~ DeepDyve