%0 Journal Article
%T Optimization of deep silicon etching process for microstructures fabrication
%A Kuzmenko, V
%A Miakonkikh, A
%A Rudenko, K
%J Journal of Physics: Conference Series
%V 2086
%N 1
%P 5
%@ 1742-6588
%D 2021-12-01
%I IOP Publishing
%~ DeepDyve