%0 Journal Article
%T SNMS studies of ULSI gate interconnection structures
%A Moro, L.
%A Lazzeri,  P.
%A Ottaviani,  G.
%A Bacci,  L.
%A Queirolo,  G.
%A Anderle,  M.
%J Analytical and Bioanalytical Chemistry
%V 341
%N 1
%P 20-24
%@ 1618-2642
%D 1991-01-01
%I Springer-Verlag
%~ DeepDyve