%0 Journal Article
%T Surface Planarization of CdZnTe Wafers: Effect of Slurry Formulation and CMP Processing Parameters on Surface Planarity
%A Qasim, Mohd
%A Parthiban, P.
%A Das, D.
%J ECS Journal of Solid State Science and Technology
%V 11
%N 8
%P 10
%@ 2162-8769
%D 2022-08-01
%I IOP Publishing
%~ DeepDyve