%0 Journal Article
%T Ceria coated hexagonal mesoporous silica core–shell composite particle abrasives for improved chemical–mechanical planarization performance
%A Chen, Ailian
%A Wang, Wanying
%A Ma, Xiangyu
%A Chen, Yang
%J Journal of Porous Materials
%V 26
%N 4
%P 1005-1015
%@ 1380-2224
%D 2018-11-30
%I Springer US
%~ DeepDyve