%0 Journal Article
%T Laser technology of SNOM-tips fabrication: process diagnostics, processing, and testing
%A Veiko, Vadim P.
%J Proceedings of SPIE
%V 5121
%N 1
%P 164-174
%@ 0277-786X
%D 2003-09-03
%I SPIE
%~ DeepDyve