%0 Journal Article
%T Novel Crosslinking Method for Negative Tone Photoresist having Pendant Carboxyl Moieties
%A Liu, Jui-Hsiang
%A Shih, Jen-Chieh
%J High Performance Polymers
%V 13
%N 1
%P 1-10
%@ 0954-0083
%D 2001-03-01
%I SAGE Publications
%~ DeepDyve