%0 Journal Article
%T Single-angle-of-incidence single-element rotating-polarizer (Single SERP) ellipsometer for film-substrate systems
%A Zaghloul, A. R. M.
%J Proceedings of SPIE
%V 8873
%P 887304-887304-11
%@ 0277-786X
%D 2013-09-27
%I SPIE
%~ DeepDyve