%0 Journal Article %T Single-angle-of-incidence single-element rotating-polarizer (Single SERP) ellipsometer for film-substrate systems %A Zaghloul, A. R. M. %J Proceedings of SPIE %V 8873 %P 887304-887304-11 %@ 0277-786X %D 2013-09-27 %I SPIE %~ DeepDyve