%0 Journal Article %T Submillimeter bolometers arrays for the PACS/Herschel spectro-photometer %A Simoens, Francois %A Rodriguez, Louis %J Proceedings of SPIE %V 5498 %N 1 %P 177-186 %@ 0277-786X %D 2004-10-08 %I SPIE %~ DeepDyve