%0 Journal Article
%T Proximity effect correction for 20nm dimension patterning
%A Tsunoda, Dai
%A Jedrasik, Piotr
%J Proceedings of SPIE
%V 7271
%N 1
%P 72712S-72712S-9
%@ 0277-786X
%D 2009-03-13
%I SPIE
%~ DeepDyve