%0 Journal Article
%T Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch
%A He, Xun-jun
%A Wu, Qun
%A Wang, Yue
%A Song, Ming-xin
%A Yin, Jing-hua
%J Microsystem Technologies
%V 15
%N 2
%P 301-307
%@ 0946-7076
%D 2008-10-14
%I Springer-Verlag
%~ DeepDyve