%0 Journal Article
%T A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements
%A Straube, Guido
%A Fischer Calderón, Juan Sebastian
%A Ortlepp, Ingo
%A Füßl, Roland
%A Manske, Eberhard
%J Nanomanufacturing and Metrology
%V 4
%N 3
%P 200-207
%@ 2520-811X
%D 2021-09-01
%I Springer Singapore
%~ DeepDyve