%0 Journal Article
%T Perspective—Electrochemical Assessment of Slurry Formulations for Chemical Mechanical Planarization of Metals: Trends, Benefits and Challenges
%A Roy, D.
%J ECS Journal of Solid State Science and Technology
%V 7
%N 5
%@ 2162-8769
%D 2018-01-01
%~ DeepDyve