%0 Journal Article
%T Gas-cluster ion-beam smoothing of chemo-mechanical-polish processed GaSb(100) substrates
%A Allen, L.
%A Tetreault, T.
%A Santeufemio, C.
%A Li, X.
%A Goodhue, W.
%A Bliss, D.
%A Tabat, M.
%A Jones, K.
%A Dallas, G.
%A Bakken, D.
%A Sung, C.
%J Journal of Electronic Materials
%V 32
%N 8
%P 842-848
%@ 0361-5235
%D 2003-03-29
%I Springer-Verlag
%~ DeepDyve