%0 Journal Article %T Etching High Aspect Ratio Silicon Trenches %A Panda, Siddhartha %A Ranade, Rajiv %A Mathad, G. Swami %J Journal of the Electrochemical Society %V 150 %N 10 %P G612-G616 %@ 0013-4651 %D 2003-08-14 %~ DeepDyve