%0 Journal Article
%T Etching High Aspect Ratio Silicon Trenches
%A Panda, Siddhartha
%A Ranade, Rajiv
%A Mathad, G. Swami
%J Journal of the Electrochemical Society
%V 150
%N 10
%P G612-G616
%@ 0013-4651
%D 2003-08-14
%~ DeepDyve