%0 Journal Article
%T High-Speed Thin Ultrasonic Spindle Motor and Its Application
%A Aoyagi, Manabu
%A Suzuki, Fumihiro
%A Tomikawa, Yoshiro
%A Kano, Ichiro
%J Japanese Journal of Applied Physics
%V 43
%N 5S
%@ 0021-4922
%D 2004-05-01
%~ DeepDyve