%0 Journal Article
%T Materials design and lithographic performance of maleic anhydride/cycloolefin copolymer for ArF resist
%A Park, Joo Hyeon
%A Jung, Jae Chang
%A Baik, Ki-Ho
%J Proceedings of SPIE
%V 3999
%N 1
%P 1163-1170
%@ 0277-786X
%D 2000-06-23
%I SPIE
%~ DeepDyve