%0 Journal Article
%T Novel technique for fabrication of multi-layered microcoils in microelectromechanical systems (MEMS) applications
%A Chang, Hung-Pin
%A Qian, Jiangyuan
%A Bachman, Mark
%A Congdon, Philip
%A Li, Guann-pyng
%J Proceedings of SPIE
%V 4700
%N 1
%P 187-195
%@ 0277-786X
%D 2002-07-10
%I SPIE
%~ DeepDyve