%0 Journal Article
%T One-Step Cleaning Solution to Replace the Conventional RCA Two-Step Cleaning Recipe for Pregate Oxide Cleaning
%A Pan, Tung Ming
%A Lei, Tan Fu
%A Chao, Tien Sheng
%A Liaw, Ming Chi
%A Ko, Fu Hsiang
%A Lu, Chih Peng
%J Journal of the Electrochemical Society
%V 148
%N 6
%P G315-G320
%@ 0013-4651
%D 2001-06-01
%~ DeepDyve