%0 Journal Article %T Effect of surface roughness on small particle adhesion forces evaluated by atomic force microscopy %A Miwa, Takafumi %A Miya, Go %A Kanno, Seiichiro %J Japanese Journal of Applied Physics %V 59 %N 7 %P 8 %@ 0021-4922 %D 2020-07-08 %~ DeepDyve