%0 Journal Article %T The development of high sensitivity silicon avalanche photodiode array %A Peng, Hongling %A Zhao, Xiangkai %A Zhang, Guanxin %A Qu, Hongwei %A Qi, Aiyi %A Li, Dongmei %A Zheng, Wanhua %J Proceedings of SPIE %V 10460 %P 104601Q-104601Q-6 %@ 0277-786X %D 2017-10-24 %I SPIE %~ DeepDyve