%0 Journal Article
%T Characterization of electrostatically chucked EUVL mask blanks
%A Ligman, Rebekah K.
%A Shu, Emily Y.
%J Proceedings of SPIE
%V 5751
%N 1
%P 640-650
%@ 0277-786X
%D 2005-05-06
%I SPIE
%~ DeepDyve