%0 Journal Article
%T Increasing the dynamic range of a micromechanical moving-plate capacitor
%A Kyynarainen, Jukka M.
%J Proceedings of SPIE
%V 4019
%N 1
%P 78-89
%@ 0277-786X
%D 2000-04-10
%I SPIE
%~ DeepDyve