%0 Journal Article
%T Residual Layer Removal of Technical Glass Resulting from Reactive Atmospheric Plasma Jet Etching by Pulsed Laser Irradiation
%A Kazemi, Faezeh
%A Arnold, Thomas
%A Lorenz, Pierre
%A Ehrhardt, Martin
%A Zimmer, Klaus
%J Plasma Chemistry and Plasma Processing
%V 40
%N 5
%P 1241-1251
%@ 0272-4324
%D 2020-09-29
%I Springer US
%~ DeepDyve