%0 Journal Article
%T Modeling and fabrication of evanescent waveguide-based optical sensor for sensitivity enhancement using silicon oxynitride technology
%A Dutta, Aradhana
%A Deka, Bidyut
%A Sahu, Partha Pratim
%A ,
%J Optical Engineering
%V 52
%N 7
%P 077101-077101
%@ 0091-3286
%D 2013-07-01
%I SPIE
%~ DeepDyve