%0 Journal Article
%T Surface Planarization of Strain-Relaxed SiGe Buffer Layers by CMP and Post Cleaning
%A Sawano, K.
%A Kawaguchi, K.
%A Koh, S.
%A Hirose, Y.
%A Hattori, T.
%A Nakagawa, K.
%A Shiraki, Y.
%J Journal of the Electrochemical Society
%V 150
%N 7
%P G376-G379
%@ 0013-4651
%D 2003-05-12
%~ DeepDyve