%0 Journal Article
%T Off-line wafer level reliability control: unique measurement method to monitor the lifetime indicator of gate oxide validated within bipolar/CMOS/DMOS technology
%A Gagnard, Xavier
%A Bonnaud, Olivier
%J Proceedings of SPIE
%V 4182
%N 1
%P 142-150
%@ 0277-786X
%D 2000-08-23
%I SPIE
%~ DeepDyve