%0 Journal Article %T Synchrotron Based Measurements Of The Soft X-Rayperformance Of Thin Film Multilayer Structures %A Kania, D. R. .. %A Bartlett, R. J. %A Trela, W. J. %J Proceedings of SPIE %V 563 %P 216-220 %@ 0277-786X %D 1985-08-06 %I SPIE %~ DeepDyve