%0 Journal Article
%T A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design
%A Tang, Xiaotian
%A Li, Ting
%A Shang, Haiping
%A Wan, Xingxing
%A Wang, Weibing
%J Journal of Micromechanics and Microengineering
%V 32
%N 10
%P 8
%@ 0960-1317
%D 2022-10-01
%I IOP Publishing
%~ DeepDyve